Vision LEAP Load Ports

Brooks is the world’s largest semiconductor automation supplier and the inventor of load port module (LPM) technology. Brooks has shipped LPMs to every semiconductor fab across the globe. Our LPMs provide ultra-clean performance and superior load port to FOUP interoperability to meet the stringent requirements of today’s semiconductor manufacturers. Brooks LPMs minimize cost and complexity by leveraging capabilities readily available in other portions of the process tool. Plus, they provide all of the necessary status and control interfaces and hardware safety interlocks to help ensure safe, efficient, and ultra-clean loading and unloading of wafers to and from the process tool.

The Vision^® LEAP^™ Load Port is the latest generation of LPMs from Brooks.  It is an intelligent and flexible factory interface module for tool automation that supports superior reliability and ultra-clean performance. Unlike LPMs that require substantial lead time for set-up and integration, the Vision LEAP Load Port is designed for maximum interoperability, seamless interchangeability, and ease of configuration. It is compatible with all SEMI-compliant Front Opening Unified Pods (FOUP) and automated Front Opening Shipping Boxes (FOSB) delivered manually or via AMHS vehicles.

Expanding upon the technological innovation and domain expertise built into Brooks’ widely installed LPMs, the Vision LEAP Load Port delivers the ultimate in manufacturability and reliability.