Wafer Handling Systems

Brooks Automation offers a comprehensive portfolio of configurable atmospheric and vacuum wafer handling platforms and systems. In addition, Brooks provides the ability to create flexible, cost effective, and unique solutions to meet each customer’s specific application. Our dedicated team of experienced professionals uses a proven collaboration methodology: listening to customers’ needs and challenges, reviewing our library of modules, and if necessary, develop customized capabilities, to provide a best-fit wafer handling solution for OEM tool automation.