M800 300mm FOUP Cleaner

The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.

Data Sheet

Key Features

  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Lid dry clean function
  • Vacuum decontamination for AMC compound removal
  • FOUP inspection station
  • 20 FOUP per hour throughput
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface