M300 Semi-Automatic FOUP/Pod Cleaner

The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.

Key Features

  • Reticle/Wafer carrier - cleaning system
  • Highest product flexibility
  • Excellent IR drying system
  • High throughput
  • Superior wash & rinse
  • Lowest CoO