The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with
optional xCDA or N2 purge.
It is based on the Tec-Sem modular, cartesian product platform, allowing a high flexibility in storage size and
load port configurations
The RPS-C is customizable in capacity and RSP interfaces
Key Features
- High availability and throughput of the RSP-C for optimum pod logistics
- Links reticle room (offline area) and production environment, providing a defined work flow
- Distributed storage in the production line
Various field-proven options available, such as:
- Shelf purge
- Manual load ports
- OHT load ports / E84
- Host interface
