The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
Key Features
- Fully automated reticle/mask handling
- Class 1 mini-environment/ESD/AMC
- Reticle orientation
- Reticle code identification
- RF-tag or barcode identification of boxes
- Bright light visual inspection
- Embedded metrology tool
- N2 blow off
